M01000 - SEMI M10 - ガリウムヒ素ウェーハに見られる構造及び特徴の確認のための標準名称 StdPbc-0820 A uniformly used

Name: M01000 - SEMI M10 - ガリウムヒ素ウェーハに見られる構造及び特徴の確認のための標準名称 StdPbc-0820 A uniformly used
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Description

A uniformly used

The purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards

この仕様はSEMI E30（GEM）に適合する装置に適用できる。

The inspection and metrology tools covered include only commercial instruments available in the 2012–2014 time frame

M01000 - SEMI M10 - ガリウムヒ素ウェーハに見られる構造及び特徴の確認のための標準名称 StdPbc-0820 A uniformly used4 2(1)(2) Referenced SEMI Standards SEMI M9 Specifications for Round Polished Monocrystalline Gallium Arsenide Slices

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