C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality StdPbc-0515 SEMI C69-0611 (first published)

Name: C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality StdPbc-0515 SEMI C69-0611 (first published)
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SEMI C69-0611 (first published)

org in October 2010

SEMI C61-0707 (first published)

SEMI C31-0699 (first published - replaces SEMI C1

C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality StdPbc-0515 SEMI C69-0611 (first published)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 0217. Available at www. semiviews. org and www. semi. org in April 2018; originally published June 2000; previously published October 2011. The purpose of this Document is to provide specification for octafluorocyclobutane (C4F8), that is used in the semiconductor

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