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The purpose of this Document is to provide specifications for hydrogen bromide (HBr) that is used in the semiconductor industry
the alphanumeric character size provides for human readability of the mark
A digital computer capable of controlling the instruments and recording data is required and significantly simplifies and improves the accuracy of the data acquisition and analysis process
本文件提供指導用以評估尾氣處理設備對F-GHG破壞或去除效率(DRE)。
S01400 - SEMI S14 - 半導體製造設備火災風險評估與降低之安全基準 StdTpc-Physical Interfaces The purpose of this DocumentNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. : Referenced SEMI StandardsSEMI E10 Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and UtilizationSEMI E70 Guide for Tool Accommodation ProcessSEMI S2 Environmental, Health, and
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