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org in May 2018
the data was obtained following this Guide
本文書の目的は，半導体産業で使用されるジメチルスルホキシドに対する要求事項を標準化し，また，要求事項に対して立証するためのテスト手順を標準化することである。このテスト方法は統計的に有効な結果を表すことが明らかとなっている。
SEMI C28-0618 (technical revision)
C07100 - SEMI C71 - Specification and Guide for Boron Trichloride (BCI3) StdPbc-0212 org in May 2018The purpose of this Document is to provide specification and guide for boron trichloride (BCl3) that are used in the semiconductor industry. This Specification relates to a geometry of 0. 5 or less (0. 35 to 0. 5 range) and describes analytical techniques using gas phase analysis. If analytical methods are not complete, the requirements are presented as guides. Referenced SEMI Standards (purchase separately) SEMI C3 Specification for Gases Revision