C04700 - SEMI C47 - Guide for Trans 1,2 Dichloroethylene StdPbc-0913 NOTICE: This Document was reapproved

NOTICE: This Document was reapproved with minor editorial changes

本文書における計量の標準単位としては，国際単位系（SI）が使用される。米国常用単量は参考目的のみのために括弧内に併記され，最も近い数値に丸められている。

While the static leach-out testing is recommended to verify the quality of the resin normally used in the facility

SEMI C61-0707 (first published)

C04700 - SEMI C47 - Guide for Trans 1,2 Dichloroethylene StdPbc-0913 NOTICE: This Document was reapprovedNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Standard is to provide a guide for a grade of trans 1,2 dichloroethylene for which a need has been identified. The scope of this Standard lists the proposed impurity limits of trans 1,2 dichloroethylene