C00322 - SEMI C3.22 - Standard for Oxygen (O2), 99.5% Quality StdPbc-1224 This Document applies only to

This Document applies only to nitrogen gas and argon gas delivered through pipelines

the reality is that each fab controls its equipment with its own specification

This Document covers requirements for carbon dioxide (CO2) that is used in the semiconductor industry

Selected terms and definitions and summary specifications are included

C00322 - SEMI C3.22 - Standard for Oxygen (O2), 99.5% Quality StdPbc-1224 This Document applies only toThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 11, 2004. Available at www. semi. org in November 2004; originally published in 1983; previously published in 1993. NOTICE: This Document was balloted and approved for withdrawal in 2004. Oxygen is a colorless, odorless and oxidizing gas. It supports combustion. Referenced SEMI