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D01800 - SEMI D18 - FPD基板水平搬送用および保管用カセット仕様 Revision:SEMI D18-0299E - Inactive SEMI E112 — Mechanical Specification

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Description

SEMI E112 — Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store 6 Inch Reticles

ここで扱う用語と定義は,

This Standard is provided specifically for the communication between supply channels as well as between manufacturers and consumers

previously published November 2009

D01800 - SEMI D18 - FPD基板水平搬送用および保管用カセット仕様 Revision:SEMI D18-0299E - Inactive SEMI E112 — Mechanical SpecificationFlat Panel Display Equipment CommitteeNorth American Flat Panel Display Committee1998815North American Regional Standards Committee19989www. semi. org19992 E 2000105 FPD0. 7 mm1. 1 mm Referenced SEMI Standards SEMI D3 Quality Area Specification for Flat Panel Display Substrates SEMI D5 Standard Size for Flat Panel Display Substrates SEMI D6 Standard Edge Length and Thickness for Flat Panel Display Mask Substrates SEMI D9 Definitions for Flat Panel

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